A microfabricated microconcentrator for sensors and gas chromatography.

The key component in trace analysis is the concentration step where the analytes are accumulated before the analysis. This paper presents the development of a micromachined microconcentrator that can be used to enhance the sensitivity of microsensors. Another application demonstrated here is a concentrator-injector for a gas chromatograph. The microconcentrators were fabricated on a 6-in. silicon substrate using standard photolithographic techniques (1 in.= 2.54 cm). The channels were lined with a resistive layer, through which an electric current could be passed to cause ohmic heating. The preconcentration was done on a thin-film polymeric layer deposited above the heater in the channel. Rapid heating of the resistive layer caused the "desorption pulse" to be injected into the sensor, or onto a GC column. Due to their small size, the microconcentrators could be fabricated 20 to 50 (depending upon the size) at a time on a 6-in. silicon wafer. This paper presents the development and characterization of the microconcentrator. It was found that the microconcentrator performed well as a concentrator, and as an injector for GC. A 14-fold enrichment factor was achieved. The microconcentrator exhibited long-term stability in response, with typical relative standard deviation of between 3 and 5%.